• HP-04
HP-04
+

HP-04


HT-04 is a perfluoroelastomer product whose chemical structure is derived from tetrafluoroethylene and perfluoroalkyl vinyl ether. This unique chemical structure provides exceptional resistance to chemicals, oils, solvents, and other aggressive media. HP-04 can achieve a hardness of 70 without the addition of fillers that might generate particles, and it exhibits remarkable tensile strength as well as superior wear resistance. Consequently, compared to other conventional products, HP-04 is particularly well-suited for etching processes in semiconductor manufacturing and other demanding dynamic operating conditions.

Physical Properties

HP04

Color

Transparent

Material

FFKM

Hardness ASTM D2240

73

Tensile Strength ASTM D412

28

100% Set Stress ASTM D412

3

Elongation at Break ASTM D412

220%

Compression Set ASTM D395

22%

Operating temperature

-10℃ to 270℃

Product Details

Performance parameters


Table 2: Physical Performance Parameters of the Plasma-Resistant Series

Physical properties

HP04

Color

Transparent

Material

FFKM

Hardness ASTM D2240

73

Tensile Strength ASTM D412

28

100% set stress ASTM D412

3

Elongation at Break ASTM D412

220%

Compression Set ASTM D395

22%

Operating temperature

-10℃ to 270℃

 

Figure 5: SEM cross-sectional images of our company’s plasma-resistant product series compared with those of competing products.

 

  Our Nai Plasma series products are specifically designed for the semiconductor industry and aim to provide an alternative material for mineral-filled perfluoroelastomers. Among them, the temperature-resistant products in the HT02/04 Nai Plasma series can withstand temperatures up to 300℃.

 

Performance characteristics


  • High purity (low extract content)
  • High-oxygen and fluorine plasma resistance
  • Particle generation is extremely low.
  • Low gas emission
  • Low friction
  • High wear resistance
  • Low modulus
  • Excellent mechanical performance and sealing performance
Molecular-level stability
Utilizing specially optimized perfluoroelastomers (FFKM) or advanced composite materials, whose molecular chain structures feature exceptionally high bond energies, effectively resist bombardment by high-energy ions and ultraviolet radiation, significantly delaying the processes of chalking, embrittlement, and cracking.
Surface integrity
Even after prolonged exposure to high-power plasma, the product surface remains smooth, effectively reducing particulates generated by surface degradation and ensuring coating quality and etching accuracy.
Pre-extraction treatment
Through advanced pre-processing techniques, low-molecular-weight substances that may remain inside the product are precipitated and removed in advance, thereby eliminating at the source the potential for condensable gases (outgassing) under vacuum and plasma conditions.
Protective film growth
The extremely low deposition rate prevents contaminants from being deposited on the wafer surface during critical CVD/PVD processes, thereby avoiding defects and ensuring the uniformity, adhesion, and electrical properties of the thin film, directly improving product yield.
Life expectancy doubled
Its exceptional anti-aging performance extends the service life of seals several times over that of conventional products, allowing them to perfectly match—or even exceed—the preventive maintenance (PM) intervals recommended by equipment manufacturers (OEMs).
Reduce costs and increase efficiency
Greatly reduce equipment downtime caused by seal replacements, lower spare parts consumption and labor costs, and simultaneously minimize unscheduled cleaning due to particulate contamination, significantly improving equipment availability and production efficiency.

Related products

O-ring

Here is placeholder text.

Large O-rings

Here is placeholder text.

Star-shaped Circle

Here is placeholder text.

V-ring

Here is placeholder text.

Frequently Asked Questions

Image name

What are the differences between perfluoroelastomer rubber, fluororubber, and fluorosilicone rubber?


Image name

Perfluoroether rubber, fluoroelastomer, and fluorosilicone rubber are all high-performance sealing materials, yet each has its own unique characteristics. Perfluoroether rubber boasts exceptional chemical resistance and high-temperature tolerance, enabling it to withstand extreme chemical environments and elevated temperatures, making it ideal for demanding industrial applications. Fluoroelastomer excels in oil resistance, heat resistance, and weatherability, and is widely used in industries such as automotive and aerospace. Fluorosilicone rubber combines the chemical resistance of fluoroelastomer with the high- and low-temperature resistance of silicone rubber, making it well-suited for applications that require both thermal stability and chemical resistance. These three materials differ in chemical structure, performance, and application scenarios; when selecting one, it’s essential to consider specific requirements.

Image name

If samples or drawings are provided, is reverse engineering possible?


Image name

Yes, we have a professional R&D team and advanced equipment, enabling us to perform reverse engineering based on the samples or drawings you provide. We’ll conduct a detailed analysis of your samples—including material composition, structural dimensions, and more—and then, in conjunction with your specific requirements, proceed with design and optimization to develop a product that meets your needs. At the same time, we’ll strictly adhere to the confidentiality agreement to ensure the security of your samples and drawings.

Image name

How do we ensure quality?


Image name

We have a rigorous quality control system that covers everything from raw material procurement and the production process to finished-product inspection. All raw materials are sourced from high-quality suppliers and undergo stringent testing. During the production process, we employ advanced equipment and technologies, and each step is governed by strict operating procedures and quality monitoring protocols. Finished products undergo thorough inspections to ensure they meet relevant standards and customer requirements. In addition, we conduct regular internal quality audits and training sessions to continuously enhance our quality management capabilities.

Image name

Why choose us first?


Image name

We have many years of experience in the production of fluororubber seals, offering a wide variety of products that have been successfully delivered to numerous industries. Our extensive track record enables us to better meet the diverse needs of our customers. We place great emphasis on product quality, implementing stringent quality controls throughout the entire process—from raw material procurement to finished-product inspection. We provide customized services and are capable of developing products tailored to specific customer requirements. We also offer comprehensive after-sales service, ensuring that we promptly address and resolve any issues our customers may encounter. By choosing us, you’ll receive high-quality products and exceptional service.

Image name

What’s the product delivery timeline, and what services will be provided afterward?


Image name

In-stock products: Orders submitted before 12:00 noon on the same day will be shipped the same day; orders submitted after 12:00 noon will be shipped the next day. For products that are not in stock and require production, the lead time is 7 to 15 days. Saturdays, Sundays, and public holidays are not counted toward the lead time.
The shipping address is in Jiaxing City, Zhejiang Province. Invoices will be issued once the order value reaches 500 yuan; the deadline for invoicing each month is the 25th. Electronic invoices will be sent via push notification; paper invoices are not provided and will be issued after you confirm receipt of the goods. For after-sales service, please contact your sales manager. Since the seals are fragile and lack markings, we do not accept returns or exchanges unless there is a quality issue. Within mainland China, we use SF Express and Kuayue Express for delivery. Orders over 1,000 yuan qualify for free shipping; for orders below 1,000 yuan, shipping fees will be collected upon delivery.

Image name

What are the payment methods?


Image name

Payment can be made via bank transfer or wire transfer, with cash-on-delivery. We do not accept other payment methods such as letters of credit. After completing the transfer, please provide proof of payment. We would like to remind you to be vigilant against scams. If you receive a call from someone claiming to be customer service or a bank employee, asking for your account details, credit card information, or instructions to perform ATM transfers and money transfers under the pretext of installment payments for your order, failed deductions, or changes to the payment method, please be highly alert.

Get more product information for free.

Note: Please leave your contact information, and our specialists will get in touch with you as soon as possible!

Submit a message