Chemical Corrosion-Resistant Series
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Performance parameters
Table 1: Physical Performance Parameters of the Chemical Corrosion-Resistant Series
Performance |
CR01 |
CR02 |
CR03 |
Color |
Adjustable |
Adjustable |
Adjustable |
Material |
FFKM |
FFKM |
FFKM |
Hardness (Shore A D2240) |
70 (adjustable) |
70 (adjustable) |
70 (adjustable) |
Tensile Strength (MPa D412) |
19 |
18.3 |
18.5 |
100% set stress (MPa D412) |
6.5 |
6.9 |
9.2 |
Elongation at break (% D412) |
185 |
224 |
150 |
Compression Set (% D395) |
20 |
21 |
19 |
Operating temperature (℃) |
-10~230 |
-10~300 |
-10~230 |
Figure 4: Comparison of Chemical Resistance and Heat Resistance of the Chemical-Resistant Product Series
As shown in the figure, our CR01 product exhibits the best chemical resistance and can also be specifically used in chemical environments containing amines. The CR02 product has a maximum temperature resistance of up to 300℃ and demonstrates superior sealing performance under high-temperature water and steam conditions compared to perfluoroelastomers based on zirconium sulfide.
Performance characteristics
Chemically resistant: Utilizing a top-grade perfluoroether rubber base compound, this material exhibits unparalleled resistance to nearly all strong acids (such as hydrofluoric acid, phosphoric acid, and sulfuric acid), strong bases (such as ammonia solution and developer), organic solvents (such as IPA, NMP, and PGMEA), highly reactive plasmas (including O2, CF4, and NF3), and high-temperature steam commonly encountered in semiconductor processes.
Stability Assurance: Extremely low swelling and shrinkage rates ensure that the seal dimensions remain stable even under severe chemical and temperature fluctuations, fundamentally eliminating cross-contamination and process drift caused by seal failure.
Ultra-low leaching: Through a proprietary formulation and refined manufacturing process, we strictly control the levels of extractable ions (such as Na+, K+, Cl-) and total hydrocarbons (THC) in the sealing rings, thereby minimizing particulate contamination and unwanted chemical reactions to the greatest extent possible, ensuring the cleanliness of the wafer surface and improving product yield.
Low gas permeability: The dense molecular structure effectively prevents the mutual permeation of process gases and atmospheric pollutants, maintaining a strictly controlled atmosphere and vacuum level within the process chamber.
Extend the maintenance cycle: Its durability, which is dozens of times greater than that of conventional fluoroelastomers (FKM), significantly extends preventive maintenance (PM) intervals, reduces equipment downtime, and boosts overall equipment effectiveness (OEE). Although the cost per unit is higher, its exceptionally long service life and guaranteed yield rate can substantially lower your total costs associated with leaks, contamination, and equipment downtime, delivering a remarkably high return on investment.
Typical application scenarios
Dry Etch: Address aggressive etching gases such as CF4, SF6, Cl2, and HBr, as well as the plasma environments they generate.
Chemical Vapor Deposition (CVD): Resists highly corrosive precursor gases and byproducts such as WF6, DCS, and NH3.
Wet Clean: Maintains long-term stability in high-temperature acidic and alkaline liquid tanks such as SC1, SC2, SPM, and DHF.
Diffusion and Ion Implantation: Maintain sealing integrity under high-energy conditions to prevent leakage of dopants.
Photolithography process: Resistant to the continuous erosion by organic solvents such as developer and stripping solutions.
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Frequently Asked Questions
What are the differences between perfluoroelastomer rubber, fluororubber, and fluorosilicone rubber?
Perfluoroether rubber, fluoroelastomer, and fluorosilicone rubber are all high-performance sealing materials, yet each has its own unique characteristics. Perfluoroether rubber boasts exceptional chemical resistance and high-temperature tolerance, enabling it to withstand extreme chemical environments and elevated temperatures, making it ideal for demanding industrial applications. Fluoroelastomer excels in oil resistance, heat resistance, and weatherability, and is widely used in industries such as automotive and aerospace. Fluorosilicone rubber combines the chemical resistance of fluoroelastomer with the high- and low-temperature resistance of silicone rubber, making it well-suited for applications that require both thermal stability and chemical resistance. These three materials differ in chemical structure, performance, and application scenarios; when selecting one, it’s essential to consider specific requirements.
If samples or drawings are provided, is reverse engineering possible?
Yes, we have a professional R&D team and advanced equipment, enabling us to perform reverse engineering based on the samples or drawings you provide. We’ll conduct a detailed analysis of your samples—including material composition, structural dimensions, and more—and then, in conjunction with your specific requirements, proceed with design and optimization to develop a product that meets your needs. At the same time, we’ll strictly adhere to the confidentiality agreement to ensure the security of your samples and drawings.
How do we ensure quality?
We have a rigorous quality control system that covers everything from raw material procurement and the production process to finished-product inspection. All raw materials are sourced from high-quality suppliers and undergo stringent testing. During the production process, we employ advanced equipment and technologies, and each step is governed by strict operating procedures and quality monitoring protocols. Finished products undergo thorough inspections to ensure they meet relevant standards and customer requirements. In addition, we conduct regular internal quality audits and training sessions to continuously enhance our quality management capabilities.
Why choose us first?
We have many years of experience in the production of fluororubber seals, offering a wide variety of products that have been successfully delivered to numerous industries. Our extensive track record enables us to better meet the diverse needs of our customers. We place great emphasis on product quality, implementing stringent quality controls throughout the entire process—from raw material procurement to finished-product inspection. We provide customized services and are capable of developing products tailored to specific customer requirements. We also offer comprehensive after-sales service, ensuring that we promptly address and resolve any issues our customers may encounter. By choosing us, you’ll receive high-quality products and exceptional service.
What’s the product delivery timeline, and what services will be provided afterward?
In-stock products: Orders submitted before 12:00 noon on the same day will be shipped the same day; orders submitted after 12:00 noon will be shipped the next day. For products that are not in stock and require production, the lead time is 7 to 15 days. Saturdays, Sundays, and public holidays are not counted toward the lead time.
The shipping address is in Jiaxing City, Zhejiang Province. Invoices will be issued once the order value reaches 500 yuan; the deadline for invoicing each month is the 25th. Electronic invoices will be sent via push notification; paper invoices are not provided and will be issued after you confirm receipt of the goods. For after-sales service, please contact your sales manager. Since the seals are fragile and lack markings, we do not accept returns or exchanges unless there is a quality issue. Within mainland China, we use SF Express and Kuayue Express for delivery. Orders over 1,000 yuan qualify for free shipping; for orders below 1,000 yuan, shipping fees will be collected upon delivery.
What are the payment methods?
Payment can be made via bank transfer or wire transfer, with cash-on-delivery. We do not accept other payment methods such as letters of credit. After completing the transfer, please provide proof of payment. We would like to remind you to be vigilant against scams. If you receive a call from someone claiming to be customer service or a bank employee, asking for your account details, credit card information, or instructions to perform ATM transfers and money transfers under the pretext of installment payments for your order, failed deductions, or changes to the payment method, please be highly alert.
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